Standard icon

IEEE STANDARD

IEC/IEEE 62659 Edition 1.0 2015-09 - IEC/IEEE International Standard - Nanomanufacturing -- Large scale manufacturing for nanoelectronics

Description: This International Standard provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way. This International Standard provides steps employed to facilitate the introduction of nanomaterials into the semiconductor manufacturing facilities. This sequence is described below under the areas of raw materials acquisition, materials processing, design, IC fabrication, testing, and end-use. These activities represent the major stages of the supply chain in semiconductor manufacturing facilities.
  • Status: Active STD Help

Get This Standard

Buy Purchase a copy of this standard Buy External Link
Access with Subscription External Link Standards Online subscribers can access this standard in IEEE Xplore Digital Library. Access Learn More